Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements

G. Witvoet; S. Kuiper; G. Kramer; M. Baeten

doi:10.1109/CCTA.2017.8062548

Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements

G. Witvoet
, S. Kuiper
, G. Kramer
, M. Baeten

Control Systems Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

1 Downloads (Pure)

Abstract

Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM overlay tool to directly measure marker-to-feature distances, and focus on the controller design of the large stroke 6-DoF hexapod motion stage which is at the heart of this tool. The stage is open-loop unstable due to magnetic gravity compensation, which calls for an initial model-based MIMO controller design, which is based on a finite-element modal analysis, geometric decoupling and SISO loopshaping. This controller is successfully validated in experiments; further controller improvements after closed-loop system identification yield a closed-loop position error of just 1 nm RMS.

Original language	English
Title of host publication	1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	726-731
Number of pages	6
ISBN (Electronic)	978-1-5090-2182-6
ISBN (Print)	978-1-5090-2183-3
DOIs	https://doi.org/10.1109/CCTA.2017.8062548
Publication status	Published - Aug 2017
Event	1st IEEE Conference on Control Technology and Applications, CCTA 2017 - The Mauna Lani Bay Hotel and Bungalows, Kohala Coast, United States Duration: 27 Aug 2017 → 30 Aug 2017 Conference number: 1

Conference

Conference	1st IEEE Conference on Control Technology and Applications, CCTA 2017
Abbreviated title	CCTA 2017
Country/Territory	United States
City	Kohala Coast
Period	27/08/17 → 30/08/17

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10.1109/CCTA.2017.8062548

Cite this

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title = "Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements",

abstract = "Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM overlay tool to directly measure marker-to-feature distances, and focus on the controller design of the large stroke 6-DoF hexapod motion stage which is at the heart of this tool. The stage is open-loop unstable due to magnetic gravity compensation, which calls for an initial model-based MIMO controller design, which is based on a finite-element modal analysis, geometric decoupling and SISO loopshaping. This controller is successfully validated in experiments; further controller improvements after closed-loop system identification yield a closed-loop position error of just 1 nm RMS.",

author = "G. Witvoet and S. Kuiper and G. Kramer and M. Baeten",

year = "2017",

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doi = "10.1109/CCTA.2017.8062548",

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booktitle = "1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "1st IEEE Conference on Control Technology and Applications, CCTA 2017, CCTA 2017 ; Conference date: 27-08-2017 Through 30-08-2017",

}

Witvoet, G, Kuiper, S, Kramer, G & Baeten, M 2017, Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements. in 1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017. Institute of Electrical and Electronics Engineers, Piscataway, pp. 726-731, 1st IEEE Conference on Control Technology and Applications, CCTA 2017, Kohala Coast, Hawaii, United States, 27/08/17. https://doi.org/10.1109/CCTA.2017.8062548

Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements. / Witvoet, G.; Kuiper, S.; Kramer, G. et al.
1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017. Piscataway: Institute of Electrical and Electronics Engineers, 2017. p. 726-731.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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N2 - Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM overlay tool to directly measure marker-to-feature distances, and focus on the controller design of the large stroke 6-DoF hexapod motion stage which is at the heart of this tool. The stage is open-loop unstable due to magnetic gravity compensation, which calls for an initial model-based MIMO controller design, which is based on a finite-element modal analysis, geometric decoupling and SISO loopshaping. This controller is successfully validated in experiments; further controller improvements after closed-loop system identification yield a closed-loop position error of just 1 nm RMS.

AB - Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM overlay tool to directly measure marker-to-feature distances, and focus on the controller design of the large stroke 6-DoF hexapod motion stage which is at the heart of this tool. The stage is open-loop unstable due to magnetic gravity compensation, which calls for an initial model-based MIMO controller design, which is based on a finite-element modal analysis, geometric decoupling and SISO loopshaping. This controller is successfully validated in experiments; further controller improvements after closed-loop system identification yield a closed-loop position error of just 1 nm RMS.

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DO - 10.1109/CCTA.2017.8062548

M3 - Conference contribution

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BT - 1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017

PB - Institute of Electrical and Electronics Engineers

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T2 - 1st IEEE Conference on Control Technology and Applications, CCTA 2017

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ER -

Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements

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