Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements

G. Witvoet, S. Kuiper, G. Kramer, M. Baeten

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Abstract

Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM overlay tool to directly measure marker-to-feature distances, and focus on the controller design of the large stroke 6-DoF hexapod motion stage which is at the heart of this tool. The stage is open-loop unstable due to magnetic gravity compensation, which calls for an initial model-based MIMO controller design, which is based on a finite-element modal analysis, geometric decoupling and SISO loopshaping. This controller is successfully validated in experiments; further controller improvements after closed-loop system identification yield a closed-loop position error of just 1 nm RMS.

Original languageEnglish
Title of host publication1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages726-731
Number of pages6
Volume2017-January
ISBN (Electronic)978-1-5090-2182-6
ISBN (Print)978-1-5090-2183-3
DOIs
Publication statusPublished - Aug 2017
Event1st IEEE Conference on Control Technology and Applications (CCTA 2017) - The Mauna Lani Bay Hotel and Bungalows, Kohala Coast, United States
Duration: 27 Aug 201730 Aug 2017
Conference number: 1

Conference

Conference1st IEEE Conference on Control Technology and Applications (CCTA 2017)
Abbreviated titleCCTA 2017
CountryUnited States
CityKohala Coast
Period27/08/1730/08/17

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