Prediction and control of acoustically induced vibrations of high-precision equipment

N.B. Roozen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


With the accuracy of metrology frame applications entering the nanometer-range, the necessity arises to tackle all types of disturbances. In the process of estimating the relative importance of the different types of disturbances on the machine accuracy, also called dynamic error budgeting, acoustic excitation has gained more importance, mainly because of the tightening of the performance requirements as well as the relatively high noise levels of air-conditioning systems in clean room. To estimate the dynamic error budget claimed by acoustic excitation already in the design phase of the machine, there is a clear need to predict this type of excitation in the design stage. This paper presents an efficient numerical procedure to predict the errors due to acoustic excitation and introduces an active structural damping concept to control acoustically induced vibrations.
Original languageEnglish
Title of host publicationProceedings of the 22rd ASPE Annual Meeting, 14-19 October, Dallas, Texas
Place of PublicationUnited States, Dallas, Texas
Publication statusPublished - 2007


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