Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling

C.P.L. Veeger, L.F.P. Etman, J. Herk, van, J.E. Rooda

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    2 Citations (Scopus)
    162 Downloads (Pure)

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