Abstract
In this report the work that has been done during a threemonth visit to theMechanical SystemControl
Laboratory at University of California Berkeley has been described.
This work was focused on the control of a single degree of freedom NIKON wafer scanner. This
includes the use of various iterative learning controllers (ILC) and a disturbance observer (DOB) to
increase the accuracy of the system.
| Original language | English |
|---|---|
| Place of Publication | Eindhoven |
| Publisher | Eindhoven University of Technology |
| Number of pages | 28 |
| Publication status | Published - 2011 |
Publication series
| Name | CST |
|---|---|
| Volume | 2011.093 |