Power Electronics for Plasma Processing: Enabling Energy-Efficient and Accurate Ion Energy Control for Semiconductor Manufacturing

Qihao Yu

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Electrical Engineering
Supervisors/Advisors	Wijnands, C.G.E. (Korneel), Promotor Vermulst, Bas J.D., Copromotor Lemmen, Erik, Copromotor
Award date	13 Sept 2023
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-5618-6
Publication status	Published - 13 Sept 2023

Proefschrift.

Access to Document

@phdthesis{0e0d8f9bab824fb7956ed77f961cb593,

title = "Power Electronics for Plasma Processing: Enabling Energy-Efficient and Accurate Ion Energy Control for Semiconductor Manufacturing",

author = "Qihao Yu",

note = "Proefschrift.",

year = "2023",

month = sep,

day = "13",

language = "English",

isbn = "978-90-386-5618-6",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Electrical Engineering",

}