Powder growth in low pressure Ar/CH4 and AR/C2H2 rf discharges

J. Beckers, W.W. Stoffels

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

No abstract.

Original language	English
Title of host publication	Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands
Place of Publication	Lunteren, The Netherlands
Pages	B4-
Publication status	Published - 2009
Event	21st NNV Symposium on Plasma Physics and Radiation Technology - De Werelt, Lunteren, Netherlands Duration: 3 Mar 2009 → 4 Mar 2009 https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Research/Conferences___Workshops/21st_NNV_symposium.pdf

Conference	21st NNV Symposium on Plasma Physics and Radiation Technology
Country/Territory	Netherlands
City	Lunteren
Period	3/03/09 → 4/03/09
Other
Internet address	https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Research/Conferences___Workshops/21st_NNV_symposium.pdf

@inproceedings{97aaa6956c5545a28b82e581d06abc0d,

title = "Powder growth in low pressure Ar/CH4 and AR/C2H2 rf discharges",

abstract = "No abstract.",

author = "J. Beckers and W.W. Stoffels",

year = "2009",

language = "English",

pages = "B4--",

booktitle = "Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands",

note = "21st NNV Symposium on Plasma Physics and Radiation Technology ; Conference date: 03-03-2009 Through 04-03-2009",

url = "https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Research/Conferences___Workshops/21st_NNV_symposium.pdf",

}

TY - GEN

T1 - Powder growth in low pressure Ar/CH4 and AR/C2H2 rf discharges

AU - Beckers, J.

AU - Stoffels, W.W.

PY - 2009

Y1 - 2009

N2 - No abstract.

AB - No abstract.

M3 - Conference contribution

SP - B4-

BT - Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands

CY - Lunteren, The Netherlands

T2 - 21st NNV Symposium on Plasma Physics and Radiation Technology

Y2 - 3 March 2009 through 4 March 2009

ER -