Original language | English |
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Title of host publication | Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) |
Editors | W.M.M. Kessels, A. Delabie |
Place of Publication | S.n. |
Publisher | s.n. |
Pages | P-71- |
Publication status | Published - 2008 |
Possibilities for ALD in 3D integrated all-solid-state batteries
M.E. Donders, H.C.M. Knoops, L. Baggetto, M.C.M. Sanden, van de, R.A.H. Niessen, P.H.L. Notten, W.M.M. Kessels
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review