Possibilities and limitations of plasma deposition

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationICPIG : International Conference on Phenomena in ionized gases : invited papers, 18th, Swansea, 13-17 July, 1987
Place of PublicationBristol
PublisherHilger
Pages156-162
Publication statusPublished - 1987

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