Positioning device, magnetic support system and lithographic apparatus

Bart Koolmees; J.P.M.B. (Hans) Vermeulen

Positioning device, magnetic support system and lithographic apparatus

Bart Koolmees (Inventor), J.P.M.B. (Hans) Vermeulen (Inventor)

Control Systems Technology

Research output: Patent › Patent publication

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Abstract

A positioning device configured to position an object, the positioning device comprising: - an object table configured to hold the object; - an electromagnetic motor configured to displace the object table, the electromagnetic motor comprising: - a coil assembly mounted to the object table; - a superconductor assembly configured to co-operate with the coil assembly to generate a driving force on the object table; -a cryogenic enclosure configured to enclose the superconductor assembly and maintain the superconductor assembly in a superconductive state; - a support for supporting the electromagnetic motor; - an electromagnetic support configured to suspend the cryogenic enclosure relative to the support, thereby maintaining a gap between the cryogenic enclosure and the support.

Original language	English
Patent number	WO2019072529
IPC	G03F 7/20 (2006.01) ,H01L 21/68 (2006.01) ,H01F 6/04 (2006.01) ,H02K 55/00 (2006.01) ,F17C 13/08 (2006.01)
Priority date	11/10/17
Filing date	24/09/18
Publication status	Published - 18 Apr 2019

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WO2019072529A1Final published version, 1.44 MB

https://nl.espacenet.com/publicationDetails/biblio?CC=WO&NR=2019072529A1&KC=A1&FT=D&ND=5&date=20190418&DB=EPODOC&locale=nl_NL

2 Conference contribution
1 Patent publication

Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly
Koolmees, B. (Inventor) & Vermeulen, J. P. M. B. (Inventor), 12 Dec 2019, IPC No. G03F 7/20 (2006.01) , H02K 3/24 (2006.01) , Patent No. WO2019233698, 9 May 2019, Priority date 5 Jun 2018, Priority No. 18175898.8
Research output: Patent › Patent publication

Open Access
File
High stiffness fixation and thermal insulation in a superconducting planar motor
Koolmees, H. B. & Vermeulen, J. P. M. B., 1 Jan 2018, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. Riemer, O., Savio, E., Billington, D., Leach, R. K. & Phillips, D. (eds.). European Society for Precision Engineering and Nanotechnology, p. 191-192 2 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
The performance potential of superconducting linear and planar motors
Koolmees, H. B., De Bruyn, B. J. H., Vermeulen, J. P. M. B., Jansen, J. W. & Lomonova, E. A., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. Billington, D. & Philips, D. (eds.). European Society for Precision Engineering and Nanotechnology, p. 465-466 2 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Cite this

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title = "Positioning device, magnetic support system and lithographic apparatus",

abstract = "A positioning device configured to position an object, the positioning device comprising: - an object table configured to hold the object; - an electromagnetic motor configured to displace the object table, the electromagnetic motor comprising: - a coil assembly mounted to the object table; - a superconductor assembly configured to co-operate with the coil assembly to generate a driving force on the object table; -a cryogenic enclosure configured to enclose the superconductor assembly and maintain the superconductor assembly in a superconductive state; - a support for supporting the electromagnetic motor; - an electromagnetic support configured to suspend the cryogenic enclosure relative to the support, thereby maintaining a gap between the cryogenic enclosure and the support.",

author = "Bart Koolmees and Vermeulen, {J.P.M.B. (Hans)}",

year = "2019",

month = apr,

day = "18",

language = "English",

type = "Patent",

note = "WO2019072529; G03F 7/20 (2006.01) ,H01L 21/68 (2006.01) ,H01F 6/04 (2006.01) ,H02K 55/00 (2006.01) ,F17C 13/08 (2006.01) ",

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TY - PAT

T1 - Positioning device, magnetic support system and lithographic apparatus

AU - Koolmees, Bart

AU - Vermeulen, J.P.M.B. (Hans)

PY - 2019/4/18

Y1 - 2019/4/18

N2 - A positioning device configured to position an object, the positioning device comprising: - an object table configured to hold the object; - an electromagnetic motor configured to displace the object table, the electromagnetic motor comprising: - a coil assembly mounted to the object table; - a superconductor assembly configured to co-operate with the coil assembly to generate a driving force on the object table; -a cryogenic enclosure configured to enclose the superconductor assembly and maintain the superconductor assembly in a superconductive state; - a support for supporting the electromagnetic motor; - an electromagnetic support configured to suspend the cryogenic enclosure relative to the support, thereby maintaining a gap between the cryogenic enclosure and the support.

AB - A positioning device configured to position an object, the positioning device comprising: - an object table configured to hold the object; - an electromagnetic motor configured to displace the object table, the electromagnetic motor comprising: - a coil assembly mounted to the object table; - a superconductor assembly configured to co-operate with the coil assembly to generate a driving force on the object table; -a cryogenic enclosure configured to enclose the superconductor assembly and maintain the superconductor assembly in a superconductive state; - a support for supporting the electromagnetic motor; - an electromagnetic support configured to suspend the cryogenic enclosure relative to the support, thereby maintaining a gap between the cryogenic enclosure and the support.

M3 - Patent publication

M1 - WO2019072529

Y2 - 2018/09/24

ER -

Positioning device, magnetic support system and lithographic apparatus

Abstract

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Research output

Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

High stiffness fixation and thermal insulation in a superconducting planar motor

The performance potential of superconducting linear and planar motors

Cite this