Position control of nano-positioning scanning stage: design and implementation of hysteresis compensation scheme with real time implementation

Sabyasachi Neogi

Research output: ThesisEngD Thesis

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Original languageEnglish
  • Sadeghian Marnani, Hamed, Supervisor
  • Naber, Wouter, External supervisor, External person
Award date10 Oct 2019
Place of PublicationEindhoven
Publication statusPublished - 23 Oct 2019

Bibliographical note

PDEng thesis

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