Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge

M.N. van den Donker; D. Jedrzejczyk; J. Klomfass; A. Hartgers; W.M.M. Kessels; M.C.M. Sanden, van de; B. Rech

Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge

M.N. van den Donker, D. Jedrzejczyk, J. Klomfass, A. Hartgers, W.M.M. Kessels, M.C.M. Sanden, van de, B. Rech

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

The at. state distribution function (ASDF) of hydrogen was numerically modeled as a function of electron d., electron temp. and neutral d., by means of a collisional-radiative modeling code. Two limiting cases regarding the hydrogen dissocn. degree were considered, namely 0% and 100% dissocn. Optical emission spectroscopy on the hydrogen Balmer series was used to exptl. obtain the ASDF from a capacitively coupled parallel plate RF hydrogen discharge. This type of discharge is typically used for amorphous and microcryst. silicon solar cell deposition. Preliminary measurements allow a comparison of exptl. and numerically obtained ASDF. The discussion treats how both model and expt. can be improved to obtain a better correlation. [on SciFinder (R)]

Original language	English
Title of host publication	International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005
Editors	E.M. Veldhuizen, van
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Pages	08-
Publication status	Published - 2005
Event	27th International Conference on Phenomena in Ionized Gases (ICPIG 2005) - Eindhoven, Netherlands Duration: 17 Jul 2005 → 22 Jul 2005

Conference

Conference	27th International Conference on Phenomena in Ionized Gases (ICPIG 2005)
Abbreviated title	ICPIG 2005
Country/Territory	Netherlands
City	Eindhoven
Period	17/07/05 → 22/07/05

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van den Donker, M. N., Jedrzejczyk, D., Klomfass, J., Hartgers, A., Kessels, W. M. M., Sanden, van de, M. C. M., & Rech, B. (2005). Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge. In E. M. Veldhuizen, van (Ed.), International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005 (pp. 08-). Eindhoven University of Technology.

van den Donker, M.N. ; Jedrzejczyk, D. ; Klomfass, J. et al. / Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge. International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005. editor / E.M. Veldhuizen, van. Eindhoven : Eindhoven University of Technology, 2005. pp. 08-

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title = "Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge",

abstract = "The at. state distribution function (ASDF) of hydrogen was numerically modeled as a function of electron d., electron temp. and neutral d., by means of a collisional-radiative modeling code. Two limiting cases regarding the hydrogen dissocn. degree were considered, namely 0% and 100% dissocn. Optical emission spectroscopy on the hydrogen Balmer series was used to exptl. obtain the ASDF from a capacitively coupled parallel plate RF hydrogen discharge. This type of discharge is typically used for amorphous and microcryst. silicon solar cell deposition. Preliminary measurements allow a comparison of exptl. and numerically obtained ASDF. The discussion treats how both model and expt. can be improved to obtain a better correlation. [on SciFinder (R)]",

author = "{van den Donker}, M.N. and D. Jedrzejczyk and J. Klomfass and A. Hartgers and W.M.M. Kessels and {Sanden, van de}, M.C.M. and B. Rech",

year = "2005",

language = "English",

pages = "08--",

editor = "{Veldhuizen, van}, E.M.",

booktitle = "International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005",

publisher = "Eindhoven University of Technology",

note = "27th International Conference on Phenomena in Ionized Gases (ICPIG 2005), ICPIG 2005 ; Conference date: 17-07-2005 Through 22-07-2005",

}

van den Donker, MN, Jedrzejczyk, D, Klomfass, J, Hartgers, A, Kessels, WMM , Sanden, van de, MCM & Rech, B 2005, Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge. in EM Veldhuizen, van (ed.), International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005. Eindhoven University of Technology, Eindhoven, pp. 08-, 27th International Conference on Phenomena in Ionized Gases (ICPIG 2005), Eindhoven, Netherlands, 17/07/05.

Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge. / van den Donker, M.N.; Jedrzejczyk, D.; Klomfass, J. et al.
International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005. ed. / E.M. Veldhuizen, van. Eindhoven: Eindhoven University of Technology, 2005. p. 08-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge

AU - van den Donker, M.N.

AU - Jedrzejczyk, D.

AU - Klomfass, J.

AU - Hartgers, A.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

AU - Rech, B.

PY - 2005

Y1 - 2005

N2 - The at. state distribution function (ASDF) of hydrogen was numerically modeled as a function of electron d., electron temp. and neutral d., by means of a collisional-radiative modeling code. Two limiting cases regarding the hydrogen dissocn. degree were considered, namely 0% and 100% dissocn. Optical emission spectroscopy on the hydrogen Balmer series was used to exptl. obtain the ASDF from a capacitively coupled parallel plate RF hydrogen discharge. This type of discharge is typically used for amorphous and microcryst. silicon solar cell deposition. Preliminary measurements allow a comparison of exptl. and numerically obtained ASDF. The discussion treats how both model and expt. can be improved to obtain a better correlation. [on SciFinder (R)]

AB - The at. state distribution function (ASDF) of hydrogen was numerically modeled as a function of electron d., electron temp. and neutral d., by means of a collisional-radiative modeling code. Two limiting cases regarding the hydrogen dissocn. degree were considered, namely 0% and 100% dissocn. Optical emission spectroscopy on the hydrogen Balmer series was used to exptl. obtain the ASDF from a capacitively coupled parallel plate RF hydrogen discharge. This type of discharge is typically used for amorphous and microcryst. silicon solar cell deposition. Preliminary measurements allow a comparison of exptl. and numerically obtained ASDF. The discussion treats how both model and expt. can be improved to obtain a better correlation. [on SciFinder (R)]

M3 - Conference contribution

SP - 08-

BT - International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005

A2 - Veldhuizen, van, E.M.

PB - Eindhoven University of Technology

CY - Eindhoven

T2 - 27th International Conference on Phenomena in Ionized Gases (ICPIG 2005)

Y2 - 17 July 2005 through 22 July 2005

ER -

van den Donker MN, Jedrzejczyk D, Klomfass J, Hartgers A, Kessels WMM , Sanden, van de MCM et al. Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge. In Veldhuizen, van EM, editor, International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005. Eindhoven: Eindhoven University of Technology. 2005. p. 08-

Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge

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