Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme

W.L.M. Weerts, N.M.A. Wild, de, M.H.J.M. Croon, de

Research output: Book/ReportReportAcademic

Original languageEnglish
Place of PublicationEindhoven
PublisherChemische Reactor Technologie
Number of pages56
Publication statusPublished - 1995

Cite this

Weerts, W. L. M., Wild, de, N. M. A., & Croon, de, M. H. J. M. (1995). Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme. Eindhoven: Chemische Reactor Technologie.
Weerts, W.L.M. ; Wild, de, N.M.A. ; Croon, de, M.H.J.M. / Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme. Eindhoven : Chemische Reactor Technologie, 1995. 56 p.
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Weerts, WLM, Wild, de, NMA & Croon, de, MHJM 1995, Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme. Chemische Reactor Technologie, Eindhoven.

Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme. / Weerts, W.L.M.; Wild, de, N.M.A.; Croon, de, M.H.J.M.

Eindhoven : Chemische Reactor Technologie, 1995. 56 p.

Research output: Book/ReportReportAcademic

TY - BOOK

T1 - Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme

AU - Weerts, W.L.M.

AU - Wild, de, N.M.A.

AU - Croon, de, M.H.J.M.

PY - 1995

Y1 - 1995

M3 - Report

BT - Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme

PB - Chemische Reactor Technologie

CY - Eindhoven

ER -

Weerts WLM, Wild, de NMA, Croon, de MHJM. Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme. Eindhoven: Chemische Reactor Technologie, 1995. 56 p.