Polysilicon deposition, LPCVD reactor modelling and design : Final report of the Interreg-IDIS programme

W.L.M. Weerts, N.M.A. Wild, de, M.H.J.M. Croon, de

Research output: Book/ReportReportAcademic

Original languageEnglish
Place of PublicationEindhoven
PublisherChemische Reactor Technologie
Number of pages56
Publication statusPublished - 1995

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