Polymerization in remote hydrocarbon deposition plasmas

A. Graaf, de, M.F.A.M. Hest, van, M.C.M. Sanden, van de, K.G.Y. Letourneur, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings
Publication statusPublished - 1999

Cite this