Polymerization in remote hydrocarbon deposition plasmas

A. Graaf, de, M.F.A.M. Hest, van, M.C.M. Sanden, van de, K.G.Y. Letourneur, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationISPC 14 : 14th International symposium on plasma chemistry, Prague, Czech Republic, August 2-6, 1999 / proceedings : vol. 4
EditorsM. Hrabovsky, M. Konrad, V. Kopecky
Place of PublicationPrague
PublisherInstitute of Plasma Physics AS CR
Pages1755-1760
ISBN (Print)80-902724-4-4
Publication statusPublished - 1999
Event14th International Symposium on Plasma Chemistry (ISPC 14), August 2-6, 1999, Prague, Czech Republic - Prague, Czech Republic
Duration: 2 Aug 19996 Aug 1999

Conference

Conference14th International Symposium on Plasma Chemistry (ISPC 14), August 2-6, 1999, Prague, Czech Republic
Abbreviated titleISPC 14
CountryCzech Republic
CityPrague
Period2/08/996/08/99
Other14th International Symposium on Plasma Chemistry, Prague, Czech Republic, 2-6 August 1999

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