Polymerisation Processes In Low-Pressure Fluorocarbon Plasmas

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Original language	English
Title of host publication	Proc. NVV Tweedaags Symposium Plasma- en Gasontladingsfysica
Place of Publication	Lunteren
Pages	45-
Publication status	Published - 1999
Event	NNV Tweedaags Symposium Plasma- en Gasontladingsfysica, 1999 - Lunteren, Netherlands Duration: 9 Mar 1999 → 10 Mar 1999

Conference	NNV Tweedaags Symposium Plasma- en Gasontladingsfysica, 1999
Country/Territory	Netherlands
City	Lunteren
Period	9/03/99 → 10/03/99
Other	NVV Tweedaags Symposium Plasma- en Gasontladingsfysica

Cite this

@inproceedings{4fcb2fcac3ec4fdaadd296806bfe717e,

title = "Polymerisation Processes In Low-Pressure Fluorocarbon Plasmas",

author = "W.W. Stoffels and \{Stoffels - Adamowicz\}, E.",

year = "1999",

language = "English",

pages = "45--",

booktitle = "Proc. NVV Tweedaags Symposium Plasma- en Gasontladingsfysica",

note = "NNV Tweedaags Symposium Plasma- en Gasontladingsfysica, 1999 ; Conference date: 09-03-1999 Through 10-03-1999",

}

TY - GEN

T1 - Polymerisation Processes In Low-Pressure Fluorocarbon Plasmas

AU - Stoffels, W.W.

AU - Stoffels - Adamowicz, E.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 45-

BT - Proc. NVV Tweedaags Symposium Plasma- en Gasontladingsfysica

CY - Lunteren

T2 - NNV Tweedaags Symposium Plasma- en Gasontladingsfysica, 1999

Y2 - 9 March 1999 through 10 March 1999

ER -