Polymer MEMS

Casper L. van Oosten, Cees W.M. Bastiaansen, Dirk J. Broer

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

Abstract

Micro electromechanical systems (MEMS) in the broadest sense are devices that are small, include mechanical elements in the order of micrometers, and convert an input signal into a mechanical movement or vice versa. Their applications range from sensors in automotive airbags, to switching micromirrors for projectors, or optical communication networks to microfluidic applications, such as inkjet heads or lab-on-a-chip devices. Traditionally, MEMS have been dominated by materials and micromachining techniques originating from the semiconductor industry [1]. However, polymers are of increasing interest because they offer a low-cost alternative while increasing the range of possibilities with respect to the potential applications [2-5]. There is a range of processing tools available for producing micrometer sized features, including embossing, lithographic processing and printing. Chemical composition provides a wide control over the properties and polymers are capable of deformations, which are orders of magnitude larger than those of inorganic actuators.

Original languageEnglish
Title of host publicationCross-Linked Liquid Crystalline Systems
Subtitle of host publicationFrom Rigid Polymer Networks to Elastomers
EditorsDirk Broer, Gregory P. Crawford, Slobodan Zumer
Place of PublicationBoca Raton
PublisherCRC Press
Pages251-285
Number of pages35
ISBN (Electronic)9781420046304
ISBN (Print)9781420046229
Publication statusPublished - 1 Jan 2011

Fingerprint

microelectromechanical systems
MEMS
Polymers
micrometers
polymers
lab-on-a-chip devices
Lab-on-a-chip
embossing
communication networks
Micromachining
projectors
Optical communication
micromachining
Processing
Fiber optic networks
Microfluidics
printing
Telecommunication networks
optical communication
Printing

Cite this

van Oosten, C. L., Bastiaansen, C. W. M., & Broer, D. J. (2011). Polymer MEMS. In D. Broer, G. P. Crawford, & S. Zumer (Eds.), Cross-Linked Liquid Crystalline Systems: From Rigid Polymer Networks to Elastomers (pp. 251-285). Boca Raton: CRC Press.
van Oosten, Casper L. ; Bastiaansen, Cees W.M. ; Broer, Dirk J. / Polymer MEMS. Cross-Linked Liquid Crystalline Systems: From Rigid Polymer Networks to Elastomers. editor / Dirk Broer ; Gregory P. Crawford ; Slobodan Zumer. Boca Raton : CRC Press, 2011. pp. 251-285
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van Oosten, CL, Bastiaansen, CWM & Broer, DJ 2011, Polymer MEMS. in D Broer, GP Crawford & S Zumer (eds), Cross-Linked Liquid Crystalline Systems: From Rigid Polymer Networks to Elastomers. CRC Press, Boca Raton, pp. 251-285.

Polymer MEMS. / van Oosten, Casper L.; Bastiaansen, Cees W.M.; Broer, Dirk J.

Cross-Linked Liquid Crystalline Systems: From Rigid Polymer Networks to Elastomers. ed. / Dirk Broer; Gregory P. Crawford; Slobodan Zumer. Boca Raton : CRC Press, 2011. p. 251-285.

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

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van Oosten CL, Bastiaansen CWM, Broer DJ. Polymer MEMS. In Broer D, Crawford GP, Zumer S, editors, Cross-Linked Liquid Crystalline Systems: From Rigid Polymer Networks to Elastomers. Boca Raton: CRC Press. 2011. p. 251-285