Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films

M. Creatore; W. Keuning; E. Langereis; H. Lifka; P. Weijer, van de; M.C.M. Sanden, van de; W.M.M. Kessels

Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films

M. Creatore
, W. Keuning
, E. Langereis
, H. Lifka
, P. Weijer, van de
, M.C.M. Sanden, van de
, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
Editors	W.M.M. Kessels, A. Delabie
Place of Publication	S.n.
Publisher	s.n.
Pages	WedA2b-2-
Publication status	Published - 2008

Cite this

Creatore, M., Keuning, W., Langereis, E., Lifka, H., Weijer, van de, P., Sanden, van de, M. C. M., & Kessels, W. M. M. (2008). Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films. In W. M. M. Kessels, & A. Delabie (Eds.), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (pp. WedA2b-2-). s.n..

@inproceedings{4274f434ae3842cbbb66db8a5fe2f408,

title = "Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films",

author = "M. Creatore and W. Keuning and E. Langereis and H. Lifka and \{Weijer, van de\}, P. and \{Sanden, van de\}, M.C.M. and W.M.M. Kessels",

year = "2008",

language = "English",

pages = "WedA2b--2--",

editor = "W.M.M. Kessels and A. Delabie",

booktitle = "Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)",

publisher = "s.n.",

}

Creatore, M, Keuning, W, Langereis, E, Lifka, H, Weijer, van de, P, Sanden, van de, MCM & Kessels, WMM 2008, Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films. in WMM Kessels & A Delabie (eds), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). s.n., S.n., pp. WedA2b-2-.

Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films. / Creatore, M.; Keuning, W.; Langereis, E. et al.
Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). ed. / W.M.M. Kessels; A. Delabie. S.n.: s.n., 2008. p. WedA2b-2-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films

AU - Creatore, M.

AU - Keuning, W.

AU - Langereis, E.

AU - Lifka, H.

AU - Weijer, van de, P.

AU - Sanden, van de, M.C.M.

AU - Kessels, W.M.M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - WedA2b-2-

BT - Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)

A2 - Kessels, W.M.M.

A2 - Delabie, A.

PB - s.n.

CY - S.n.

ER -

Creatore M, Keuning W, Langereis E, Lifka H, Weijer, van de P, Sanden, van de MCM et al. Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films. In Kessels WMM, Delabie A, editors, Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). S.n.: s.n. 2008. p. WedA2b-2-