Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films

M. Creatore, W. Keuning, E. Langereis, H. Lifka, P. Weijer, van de, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
EditorsW.M.M. Kessels, A. Delabie
Place of PublicationS.n.
Publishers.n.
PagesWedA2b-2-
Publication statusPublished - 2008

Cite this

Creatore, M., Keuning, W., Langereis, E., Lifka, H., Weijer, van de, P., Sanden, van de, M. C. M., & Kessels, W. M. M. (2008). Polymer-Led encapsulation by means of plasma-assisted ALD AI2O3 films. In W. M. M. Kessels, & A. Delabie (Eds.), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (pp. WedA2b-2-). S.n.: s.n..