Poly-Diagnostics on and multi-modeling of MIPS

J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationProceedings of the 7th International Workshop on Microwave Discharges : Fundamentals and Applications 2009, (MD 7) 23-27 September 2009, Hamana-Iake, Japan
EditorsJ. Schmidt, M. Simek, S. Pekarek
Publication statusPublished - 2009

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