Original language | English |
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Title of host publication | Proceedings of the 7th International Workshop on Microwave Discharges : Fundamentals and Applications 2009, (MD 7) 23-27 September 2009, Hamana-Iake, Japan |
Editors | J. Schmidt, M. Simek, S. Pekarek |
Publication status | Published - 2009 |
Poly-Diagnostics on and multi-modeling of MIPS
J.J.A.M. Mullen, van der
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic