Poly-diagnostic study of low pressure microwave plasmas

S. Hübner

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • Kroesen, Gerrit M.W., Promotor
  • van Veldhuizen, Eddie M., Copromotor
  • Nijdam, Sander, Copromotor
Award date21 Oct 2013
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-3463-0
DOIs
Publication statusPublished - 2013

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