Poly-diagnostic study of low pressure microwave plasmas

S. Hübner

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kroesen, Gerrit M.W., Promotor van Veldhuizen, Eddie M., Copromotor Nijdam, Sander, Copromotor
Award date	21 Oct 2013
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3463-0
DOIs	https://doi.org/10.6100/IR759549
Publication status	Published - 2013

Access to Document

@phdthesis{b654ef8c6233414d928ed4a89dbf51a0,

title = "Poly-diagnostic study of low pressure microwave plasmas",

author = "S. H{\"u}bner",

year = "2013",

doi = "10.6100/IR759549",

language = "English",

isbn = "978-90-386-3463-0",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}