Polarization-selective optical lithography

M.P. Van

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

407 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Chemical Engineering and Chemistry
Supervisors/Advisors
  • Broer, Dirk J., Promotor
  • Urbach, H. Paul, Promotor, External person
  • Bastiaansen, Cees W.M., Copromotor
Award date22 Jan 2015
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-3760-0
DOIs
Publication statusPublished - 22 Jan 2015

Bibliographical note

Proefschrift

Cite this

Van, M. P. (2015). Polarization-selective optical lithography. Eindhoven: Technische Universiteit Eindhoven. https://doi.org/10.6100/IR783894
Van, M.P.. / Polarization-selective optical lithography. Eindhoven : Technische Universiteit Eindhoven, 2015. 136 p.
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author = "M.P. Van",
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year = "2015",
month = "1",
day = "22",
doi = "10.6100/IR783894",
language = "English",
isbn = "978-90-386-3760-0",
publisher = "Technische Universiteit Eindhoven",
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Van, MP 2015, 'Polarization-selective optical lithography', Doctor of Philosophy, Department of Chemical Engineering and Chemistry, Eindhoven. https://doi.org/10.6100/IR783894

Polarization-selective optical lithography. / Van, M.P.

Eindhoven : Technische Universiteit Eindhoven, 2015. 136 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

TY - THES

T1 - Polarization-selective optical lithography

AU - Van, M.P.

N1 - Proefschrift

PY - 2015/1/22

Y1 - 2015/1/22

U2 - 10.6100/IR783894

DO - 10.6100/IR783894

M3 - Phd Thesis 1 (Research TU/e / Graduation TU/e)

SN - 978-90-386-3760-0

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -

Van MP. Polarization-selective optical lithography. Eindhoven: Technische Universiteit Eindhoven, 2015. 136 p. https://doi.org/10.6100/IR783894