Polarization-selective optical lithography

M.P. Van

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Chemical Engineering and Chemistry
Supervisors/Advisors	Broer, Dirk J., Promotor Urbach, H. Paul, Promotor, External person Bastiaansen, Cees, Copromotor
Award date	22 Jan 2015
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3760-0
DOIs	https://doi.org/10.6100/IR783894
Publication status	Published - 22 Jan 2015

Proefschrift

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@phdthesis{a54b9d76d28f4468bf6c0a867794e5e2,

title = "Polarization-selective optical lithography",

author = "M.P. Van",

note = "Proefschrift",

year = "2015",

month = jan,

day = "22",

doi = "10.6100/IR783894",

language = "English",

isbn = "978-90-386-3760-0",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Chemical Engineering and Chemistry",

}