Polarization-selective optical lithography

M.P. Van

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Chemical Engineering and Chemistry
Supervisors/Advisors
  • Broer, Dirk J., Promotor
  • Urbach, H. Paul, Promotor, External person
  • Bastiaansen, Cees W.M., Copromotor
Award date22 Jan 2015
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-3760-0
DOIs
Publication statusPublished - 22 Jan 2015

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