Abstract
The defocus polar rose estimation method (POEM) is introduced here as an alternative method for defocus estimation in scanning transmission electron microscopy. Its principle of operation is discussed in detail along with the results of initial simulation-based performance tests. The results show that POEM can attain a precision similar to that of equivalent methods in the literature but using significantly less data, thus increasing the defocus estimation speed significantly.
| Original language | English |
|---|---|
| Title of host publication | 2011 IEEE International Instrumentation and Measurement Technology Conference |
| Publisher | Institute of Electrical and Electronics Engineers |
| Pages | 1228-1232 |
| Number of pages | 5 |
| ISBN (Electronic) | 978-1-4244-7935-1 |
| ISBN (Print) | 978-1-4244-7933-7 |
| DOIs | |
| Publication status | Published - 7 Jul 2011 |
| Externally published | Yes |
| Event | 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Binjiang, Hangzhou, China Duration: 10 May 2011 → 12 May 2011 |
Conference
| Conference | 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 |
|---|---|
| Country/Territory | China |
| City | Binjiang, Hangzhou |
| Period | 10/05/11 → 12/05/11 |
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