Plasma-surface interaction: In situ and real time studies during plasma processing of materials

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2006
EventRensselaer Polytechnic Institute, Troy, NY, USA -
Duration: 31 May 200631 May 2006

Conference

ConferenceRensselaer Polytechnic Institute, Troy, NY, USA
Period31/05/0631/05/06
OtherRensselaer Polytechnic Institute

Cite this

@conference{118650079db2417d89511949210eb5d4,
title = "Plasma-surface interaction: In situ and real time studies during plasma processing of materials",
author = "{Sanden, van de}, M.C.M.",
year = "2006",
language = "English",
note = "Rensselaer Polytechnic Institute, Troy, NY, USA ; Conference date: 31-05-2006 Through 31-05-2006",

}

Sanden, van de, MCM 2006, 'Plasma-surface interaction: In situ and real time studies during plasma processing of materials' Rensselaer Polytechnic Institute, Troy, NY, USA, 31/05/06 - 31/05/06, .

Plasma-surface interaction: In situ and real time studies during plasma processing of materials. / Sanden, van de, M.C.M.

2006. Rensselaer Polytechnic Institute, Troy, NY, USA, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - Plasma-surface interaction: In situ and real time studies during plasma processing of materials

AU - Sanden, van de, M.C.M.

PY - 2006

Y1 - 2006

M3 - Other

ER -