Plasma-surface interaction: In situ and real time studies during plasma processing of materials

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2005
Eventconference; GEC Conference; 2007-10-16; 2007-10-16 -
Duration: 16 Oct 200716 Oct 2007

Conference

Conferenceconference; GEC Conference; 2007-10-16; 2007-10-16
Period16/10/0716/10/07
OtherGEC Conference

Cite this

@conference{f0a2e9039f3443cdbfd3e0a38f2772dd,
title = "Plasma-surface interaction: In situ and real time studies during plasma processing of materials",
author = "{Sanden, van de}, M.C.M.",
year = "2005",
language = "English",
note = "conference; GEC Conference; 2007-10-16; 2007-10-16 ; Conference date: 16-10-2007 Through 16-10-2007",

}

Sanden, van de, MCM 2005, 'Plasma-surface interaction: In situ and real time studies during plasma processing of materials' conference; GEC Conference; 2007-10-16; 2007-10-16, 16/10/07 - 16/10/07, .

Plasma-surface interaction: In situ and real time studies during plasma processing of materials. / Sanden, van de, M.C.M.

2005. conference; GEC Conference; 2007-10-16; 2007-10-16, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - Plasma-surface interaction: In situ and real time studies during plasma processing of materials

AU - Sanden, van de, M.C.M.

PY - 2005

Y1 - 2005

M3 - Other

ER -