Plasma-surface interaction during the growth of silicon and carbon thin films: in situ plasma and surface studies

Research output: Contribution to conference › Other › Academic

Original language	English
Publication status	Published - 2009
Event	conference; Institut für Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23 - Duration: 23 Jan 2009 → 23 Jan 2009

Conference	conference; Institut für Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23
Period	23/01/09 → 23/01/09
Other	Institut für Energieforschung – Plasmaphysik

Cite this

@conference{b25f7bd70b5842d89320fda6ac739889,

title = "Plasma-surface interaction during the growth of silicon and carbon thin films: in situ plasma and surface studies",

author = "\{Sanden, van de\}, M.C.M.",

year = "2009",

language = "English",

note = "conference; Institut f{\"u}r Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23 ; Conference date: 23-01-2009 Through 23-01-2009",

}