Plasma-surface interaction during the growth of silicon and carbon thin films: in situ plasma and surface studies

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2009
Eventconference; Institut für Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23 -
Duration: 23 Jan 200923 Jan 2009

Conference

Conferenceconference; Institut für Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23
Period23/01/0923/01/09
OtherInstitut für Energieforschung – Plasmaphysik

Cite this