Plasma-surface interaction during the growth of silica-like films: understanding the growth mechanism

Research output: Contribution to conference › Other › Academic

Original languageEnglish
Publication statusPublished - 2009
Eventconference; E-MRS; 2009-06-08; 2009-06-08 -
Duration: 8 Jun 2009 → 8 Jun 2009

Conference

Conferenceconference; E-MRS; 2009-06-08; 2009-06-08
Period8/06/09 → 8/06/09
OtherE-MRS

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