Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

P.J. Oever, van den, W.M.M. Kessels, B. Hoex, R.C.M. Bosch, A.J.M. van Erven, R.L.J.R. Pennings, W.T.M. Stals, M.D. Bijker, M.C.M. Sanden, van de

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2 Citations (Scopus)

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Physics & Astronomy