Plasma processing research at the TU/e

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2005
Eventconference; BOC Edwards; 2005-03-27; 2005-03-27 -
Duration: 27 Mar 200527 Mar 2005

Conference

Conferenceconference; BOC Edwards; 2005-03-27; 2005-03-27
Period27/03/0527/03/05
OtherBOC Edwards

Cite this

Sanden, van de, M. C. M. (2005). Plasma processing research at the TU/e. conference; BOC Edwards; 2005-03-27; 2005-03-27, .
Sanden, van de, M.C.M. / Plasma processing research at the TU/e. conference; BOC Edwards; 2005-03-27; 2005-03-27, .
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title = "Plasma processing research at the TU/e",
author = "{Sanden, van de}, M.C.M.",
year = "2005",
language = "English",
note = "conference; BOC Edwards; 2005-03-27; 2005-03-27 ; Conference date: 27-03-2005 Through 27-03-2005",

}

Sanden, van de, MCM 2005, 'Plasma processing research at the TU/e' conference; BOC Edwards; 2005-03-27; 2005-03-27, 27/03/05 - 27/03/05, .

Plasma processing research at the TU/e. / Sanden, van de, M.C.M.

2005. conference; BOC Edwards; 2005-03-27; 2005-03-27, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - Plasma processing research at the TU/e

AU - Sanden, van de, M.C.M.

PY - 2005

Y1 - 2005

M3 - Other

ER -

Sanden, van de MCM. Plasma processing research at the TU/e. 2005. conference; BOC Edwards; 2005-03-27; 2005-03-27, .