@inproceedings{ee020a0096234ea98ba4f6333b164151,
title = "Plasma processing : controlling complexity through in situ analysis",
author = "{Sanden, van de}, M.C.M.",
year = "2008",
language = "English",
pages = "2--2",
booktitle = "Proceedings of the 11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008), September 15-19, 2008, Garmisch-Partenkirchen, Germany (Abstracts)",
publisher = "s.n.",
note = "11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008) ; Conference date: 15-09-2008 Through 19-09-2008",
}