Plasma processing : controlling complexity through in situ analysis

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008), September 15-19, 2008, Garmisch-Partenkirchen, Germany (Abstracts)
Place of PublicationS.l.
Publishers.n.
Pages2-2
Publication statusPublished - 2008
Event11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008) - Garmisch-Partenkirchen, Germany
Duration: 15 Sep 200819 Sep 2008

Conference

Conference11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008)
Country/TerritoryGermany
CityGarmisch-Partenkirchen
Period15/09/0819/09/08

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