Plasma processing; controlling complexity through in situ analysis

M.C.M. Sanden, van de

Plasma processing; controlling complexity through in situ analysis

Plasma & Materials Processing

Research output: Contribution to conference › Other › Academic

Original language	English
Publication status	Published - 2008
Event	conference; Workshop: Plasma Processes and Polymers II, Charles University; 2008-01-25; 2008-01-25 - Duration: 25 Jan 2008 → 25 Jan 2008

Conference

Conference	conference; Workshop: Plasma Processes and Polymers II, Charles University; 2008-01-25; 2008-01-25
Period	25/01/08 → 25/01/08
Other	Workshop: Plasma Processes and Polymers II, Charles University

Cite this

@conference{cb23369dadff4e16bd4f86df08738eb2,

title = "Plasma processing; controlling complexity through in situ analysis",

author = "{Sanden, van de}, M.C.M.",

year = "2008",

language = "English",

note = "conference; Workshop: Plasma Processes and Polymers II, Charles University; 2008-01-25; 2008-01-25 ; Conference date: 25-01-2008 Through 25-01-2008",

}