Plasma processing : controlling complexity through in situ analysis

Research output: Contribution to conferenceOtherAcademic

Conference

Conferenceconference; FOM Rijnhuizen; 2010-09-29; 2010-09-29
Period29/09/1029/09/10
OtherFOM Rijnhuizen

Cite this

Sanden, van de, M. C. M. (2011). Plasma processing : controlling complexity through in situ analysis. conference; FOM Rijnhuizen; 2010-09-29; 2010-09-29, .
@conference{dafbc7102afa4f06880b26708d7ee424,
title = "Plasma processing : controlling complexity through in situ analysis",
author = "{Sanden, van de}, M.C.M.",
year = "2011",
language = "English",
note = "conference; FOM Rijnhuizen; 2010-09-29; 2010-09-29 ; Conference date: 29-09-2010 Through 29-09-2010",

}

Sanden, van de, MCM 2011, 'Plasma processing : controlling complexity through in situ analysis' conference; FOM Rijnhuizen; 2010-09-29; 2010-09-29, 29/09/10 - 29/09/10, .

Plasma processing : controlling complexity through in situ analysis. / Sanden, van de, M.C.M.

2011. conference; FOM Rijnhuizen; 2010-09-29; 2010-09-29, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - Plasma processing : controlling complexity through in situ analysis

AU - Sanden, van de,M.C.M.

PY - 2011

Y1 - 2011

M3 - Other

ER -

Sanden, van de MCM. Plasma processing : controlling complexity through in situ analysis. 2011. conference; FOM Rijnhuizen; 2010-09-29; 2010-09-29, .