Plasma processing and the importance of surface molecule generation

D.C. Schram, R.A.B. Zijlmans, O.G. Gabriel, G. Yagci, R.A.H. Engeln

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publication14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania
EditorsB. Mitu, G. Dinescu
Pages12-
Publication statusPublished - 2007

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