@conference{52f35d68d1cf4b028a7a6bc9f4f1abae,
title = "Plasma-polymer interaction leading to interphase formation during SiO2-like film deposition",
author = "M. Creatore and V.I.T.A. Lohmann and {Sanden, van de}, M.C.M.",
note = "18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts; 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands ; Conference date: 22-03-2006 Through 23-03-2006",
year = "2006",
language = "English",
pages = "B 11--",
}