Plasma particle lofting: experimental measurements using vibrations

D.P.J. van Leuken; L.C.J. Heijmans; S. Nijdam

Plasma particle lofting: experimental measurements using vibrations

D.P.J. van Leuken, L.C.J. Heijmans, S. Nijdam

Research output: Contribution to conference › Poster

Abstract

A plasma can loft particles off a surface due to an electric force. This plasma particle lofting has been proposed as a novel cleaning technique for the high-tech industry. This, however, requires a better understanding of the involved processes. Therefore we have used a specialised setup, involving vibration forces, to experimentally measure the forces on a particle on a surface. We have found that applying a plasma causes a significant reduction in particle adhesion. In this contribution we describe these measurements and focus on the effect of capillary forces due to water.

Original language	English
Publication status	Published - 3 Dec 2015
Event	18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015) - Conference centre "Rolduc", Kerkrade, Netherlands Duration: 3 Dec 2015 → 4 Dec 2015 http://phys.tue.nl/pmp/WELTPP/home/151001_ann_fin.pdf

Workshop

Workshop	18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015)
Abbreviated title	WELTPP-18
Country/Territory	Netherlands
City	Kerkrade
Period	3/12/15 → 4/12/15
Internet address	http://phys.tue.nl/pmp/WELTPP/home/151001_ann_fin.pdf

Cite this

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title = "Plasma particle lofting: experimental measurements using vibrations",

abstract = "A plasma can loft particles off a surface due to an electric force. This plasma particle lofting has been proposed as a novel cleaning technique for the high-tech industry. This, however, requires a better understanding of the involved processes. Therefore we have used a specialised setup, involving vibration forces, to experimentally measure the forces on a particle on a surface. We have found that applying a plasma causes a significant reduction in particle adhesion. In this contribution we describe these measurements and focus on the effect of capillary forces due to water.",

author = "{van Leuken}, D.P.J. and L.C.J. Heijmans and S. Nijdam",

year = "2015",

month = dec,

day = "3",

language = "English",

note = "18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015), WELTPP-18 ; Conference date: 03-12-2015 Through 04-12-2015",

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}

TY - CONF

T1 - Plasma particle lofting

T2 - 18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015)

AU - van Leuken, D.P.J.

AU - Heijmans, L.C.J.

AU - Nijdam, S.

PY - 2015/12/3

Y1 - 2015/12/3

N2 - A plasma can loft particles off a surface due to an electric force. This plasma particle lofting has been proposed as a novel cleaning technique for the high-tech industry. This, however, requires a better understanding of the involved processes. Therefore we have used a specialised setup, involving vibration forces, to experimentally measure the forces on a particle on a surface. We have found that applying a plasma causes a significant reduction in particle adhesion. In this contribution we describe these measurements and focus on the effect of capillary forces due to water.

AB - A plasma can loft particles off a surface due to an electric force. This plasma particle lofting has been proposed as a novel cleaning technique for the high-tech industry. This, however, requires a better understanding of the involved processes. Therefore we have used a specialised setup, involving vibration forces, to experimentally measure the forces on a particle on a surface. We have found that applying a plasma causes a significant reduction in particle adhesion. In this contribution we describe these measurements and focus on the effect of capillary forces due to water.

M3 - Poster

Y2 - 3 December 2015 through 4 December 2015

ER -

Plasma particle lofting: experimental measurements using vibrations

Abstract

Workshop

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