Plasma particle lofting: experimental measurements using vibrations

D.P.J. van Leuken, L.C.J. Heijmans, S. Nijdam

Research output: Contribution to conferencePosterAcademic

Abstract

A plasma can loft particles off a surface due to an electric force. This plasma particle lofting has been proposed as a novel cleaning technique for the high-tech industry. This, however, requires a better understanding of the involved processes. Therefore we have used a specialised setup, involving vibration forces, to experimentally measure the forces on a particle on a surface. We have found that applying a plasma causes a significant reduction in particle adhesion. In this contribution we describe these measurements and focus on the effect of capillary forces due to water.
Original languageEnglish
Publication statusPublished - 3 Dec 2015
Event18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015) - Conference centre "Rolduc", Kerkrade, Netherlands
Duration: 3 Dec 20154 Dec 2015
http://phys.tue.nl/pmp/WELTPP/home/151001_ann_fin.pdf

Workshop

Workshop18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015)
Abbreviated titleWELTPP-18
CountryNetherlands
CityKerkrade
Period3/12/154/12/15
Internet address

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