Plasma particle lofting : experimental investigation of dust removal force

L.C.J. Heijmans, S. Nijdam

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Abstract

Dust is everywhere. Sometimes it's harmless, but sometimes it needs to be removed. Especially in modern optical machinery, dust control can be of vital importance. In this research we look at dust on a surface. We focus on the behaviour under influence of a plasma.

The dust particles will stick to a surface due to the adhesive Van der Waals force. This force is hard to determine theoretically, as it highly depends on the local surface topology. Therefore, we have developed a method to experimentally measure this adhesive force. This method uses the inverse piezoelectric effect. We apply vibrations with increasing amplitude to the surface. This way we can observe which force is required for dust removal.

The required force is reduced when a plasma is applied over the surface. This may have different causes: the charging due to the plasma sheath may cause an additional force; the surface chemistry may change causing a lower adhesive force; the piezo vibrations may be influenced by the electrons. Current research is ongoing to find which of these effects causes the force reduction.
Original languageEnglish
Number of pages1
Publication statusPublished - 10 Mar 2015
Event27th NNV Symposium on Plasma Physics and Radiation Technology - De Werelt, Lunteren, Netherlands
Duration: 10 Mar 201511 Mar 2015
http://www.plasmalunteren.nl/sites/default/files/booklet_lunteren_2015.pdf

Conference

Conference27th NNV Symposium on Plasma Physics and Radiation Technology
CountryNetherlands
CityLunteren
Period10/03/1511/03/15
Other
Internet address

Bibliographical note

Proceeding of the 27th Symposium Plasma Physics & Radiation Technology, 10-11 March 2015, Lunteren, the Netherlands

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    Heijmans, L. C. J., & Nijdam, S. (2015). Plasma particle lofting : experimental investigation of dust removal force. Poster session presented at 27th NNV Symposium on Plasma Physics and Radiation Technology, Lunteren, Netherlands.