@inproceedings{d795717b97214e269e9a883826595596,
title = "Plasma enhanced chemical vapor deposition of ZnO : AI Iayers for thin film photovoltaics : control on the film growth",
author = "M. Creatore and I. Volintiru and C.I.M.A. Spee and {Sanden, van de}, M.C.M.",
year = "2009",
language = "English",
pages = "16--16",
booktitle = "Proceedings of the 11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008), September 15-19, 2008, Garmisch-Partenkirchen, Germany (Abstracts)",
publisher = "s.n.",
note = "11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008) ; Conference date: 15-09-2008 Through 19-09-2008",
}