Plasma-enhanced atmospheric-pressure spatial ALD of Al2O3 and ZrO2

Y. Creyghton, A. Illiberi, A. Mione, W. Van Boekel, N. Debernardi, M. Seitz, F. Van Den Bruele, P. Poodt, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Engineering & Materials Science