TY - GEN
T1 - Plasma deposition processes
AU - Schram, D.C.
AU - Sanden, van de, M.C.M.
AU - Gielen, J.W.A.M.
AU - Severens, R.J.
AU - Paffen, R.M.J.
PY - 1996
Y1 - 1996
N2 - A review with 29 refs. focused on the deposition of Si films and thin films of amorphous hydrogenated carbon. With plasma deposition, many materials can be deposited, varying from cryst. (e.g. diamond, graphite) to polycryst. and amorphous films. Plasmas offer nearly unlimited choice of materials, a large versatility in conditions and efficient use of monomers and energy. The various approaches used nowadays are discussed together with a crit. evaluation of the various processes occurring in the plasma and in the plasma wall interaction. The various subprocesses (e.g., ionization, fragmentation, adsorption, and desorption) and recirculation are illustrated with examples taken from high d. plasma deposition. Conclusions were drawn on future outlook. [on SciFinder (R)]
AB - A review with 29 refs. focused on the deposition of Si films and thin films of amorphous hydrogenated carbon. With plasma deposition, many materials can be deposited, varying from cryst. (e.g. diamond, graphite) to polycryst. and amorphous films. Plasmas offer nearly unlimited choice of materials, a large versatility in conditions and efficient use of monomers and energy. The various approaches used nowadays are discussed together with a crit. evaluation of the various processes occurring in the plasma and in the plasma wall interaction. The various subprocesses (e.g., ionization, fragmentation, adsorption, and desorption) and recirculation are illustrated with examples taken from high d. plasma deposition. Conclusions were drawn on future outlook. [on SciFinder (R)]
M3 - Conference contribution
SN - 0-87339-295-7
T3 - Book Institute of Metals
SP - 383
EP - 399
BT - Surface Modification Technologies IX : proceedings of the International Conference on Surface Modification Technologies, 9th, Cleveland, Oct. 29-Nov. 2, 1995
A2 - Sudarshan, T.S.
A2 - Reitz, W.
A2 - Stiglich, J.J.
PB - Warrendale
CY - Minerals, Metals and Materials Society
T2 - 9th International Conference on Surface Modification Technologies
Y2 - 29 October 1996 through 2 November 1996
ER -