TY - JOUR
T1 - Plasma chemistry during deposition of a-C:H
AU - Benedikt, J.
AU - Letourneur, K.G.Y.
AU - Wisse, M.
AU - Schram, D.C.
AU - Sanden, van de, M.C.M.
PY - 2002
Y1 - 2002
N2 - The different dissociation products (C, C/sub 2/, CH and C/sub 2/H) from C/sub 2/H/sub 2/ dissociation in a remote Ar/C/sub 2/H/sub 2/ plasma were measured using Cavity Ring Down Spectroscopy (CRDS). Whereas the radicals C, C/sub 2/ and CH were spectrally identified, in the region where C/sub 2/H absorption is usually assigned (260-290 nm) only broadband absorption was observed. Suggestions are given on how to explain the broadband absorption, but as yet no clear identification has been made and no species assigned to it
AB - The different dissociation products (C, C/sub 2/, CH and C/sub 2/H) from C/sub 2/H/sub 2/ dissociation in a remote Ar/C/sub 2/H/sub 2/ plasma were measured using Cavity Ring Down Spectroscopy (CRDS). Whereas the radicals C, C/sub 2/ and CH were spectrally identified, in the region where C/sub 2/H absorption is usually assigned (260-290 nm) only broadband absorption was observed. Suggestions are given on how to explain the broadband absorption, but as yet no clear identification has been made and no species assigned to it
U2 - 10.1016/S0925-9635(01)00534-9
DO - 10.1016/S0925-9635(01)00534-9
M3 - Article
VL - 11
SP - 989
EP - 993
JO - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 3-6
ER -