Plasma beam deposition of amorphous hydrogenated silicon

G.J. Meeusen

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Schram, Daan C., Promotor Hagedoorn, H.L., Promotor van de Sanden, M.C.M. (Richard), Copromotor
Award date	8 Jul 1994
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
DOIs	https://doi.org/10.6100/IR418314
Publication status	Published - 1994

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