Plasma beam deposition of amorphous hydrogenated silicon

G.J. Meeusen

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • Schram, Daan C., Promotor
  • Hagedoorn, H.L., Promotor
  • van de Sanden, M.C.M. (Richard), Copromotor
Award date8 Jul 1994
Place of PublicationEindhoven
Publisher
DOIs
Publication statusPublished - 1994

Bibliographical note

Proefschrift.

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