Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)
Place of PublicationS.l.
Publishers.n.
Pages37-37
Publication statusPublished - 2006
Eventconference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany - Garmisch-Partenkirchen, Germany
Duration: 10 Sep 200615 Sep 2006

Conference

Conferenceconference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany
Abbreviated titlePSE 2006
CountryGermany
CityGarmisch-Partenkirchen
Period10/09/0615/09/06
Other10th International Conference on Plasma Surface Engineering

Cite this

Creatore, M., Langereis, E., Heil, S. B. S., Sanden, van de, M. C. M., & Kessels, W. M. M. (2006). Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition. In Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts) (pp. 37-37). S.l.: s.n..