Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition

M. Creatore; E. Langereis; S.B.S. Heil; M.C.M. Sanden, van de; W.M.M. Kessels

Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition

M. Creatore, E. Langereis, S.B.S. Heil, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)
Place of Publication	S.l.
Publisher	s.n.
Pages	37-37
Publication status	Published - 2006
Event	conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany - Garmisch-Partenkirchen, Germany Duration: 10 Sept 2006 → 15 Sept 2006

Conference

Conference	conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany
Abbreviated title	PSE 2006
Country/Territory	Germany
City	Garmisch-Partenkirchen
Period	10/09/06 → 15/09/06
Other	10th International Conference on Plasma Surface Engineering

Cite this

Creatore, M., Langereis, E., Heil, S. B. S., Sanden, van de, M. C. M., & Kessels, W. M. M. (2006). Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition. In Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts) (pp. 37-37). s.n..

Creatore, M. ; Langereis, E. ; Heil, S.B.S. et al. / Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition. Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l. : s.n., 2006. pp. 37-37

@inproceedings{bffc746da892463d9e0898899fb4e3f5,

title = "Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition",

author = "M. Creatore and E. Langereis and S.B.S. Heil and {Sanden, van de}, M.C.M. and W.M.M. Kessels",

year = "2006",

language = "English",

pages = "37--37",

booktitle = "Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)",

publisher = "s.n.",

note = "conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany, PSE 2006 ; Conference date: 10-09-2006 Through 15-09-2006",

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Creatore, M , Langereis, E, Heil, SBS, Sanden, van de, MCM & Kessels, WMM 2006, Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition. in Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). s.n., S.l., pp. 37-37, conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany, Garmisch-Partenkirchen, Germany, 10/09/06.

Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition. / Creatore, M.; Langereis, E.; Heil, S.B.S. et al.
Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., 2006. p. 37-37.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition

AU - Creatore, M.

AU - Langereis, E.

AU - Heil, S.B.S.

AU - Sanden, van de, M.C.M.

AU - Kessels, W.M.M.

PY - 2006

Y1 - 2006

M3 - Conference contribution

SP - 37

EP - 37

BT - Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)

PB - s.n.

CY - S.l.

T2 - conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany

Y2 - 10 September 2006 through 15 September 2006

ER -

Creatore M , Langereis E, Heil SBS, Sanden, van de MCM , Kessels WMM. Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition. In Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n. 2006. p. 37-37