Plasma-assisted atomic layer deposition of AI2O3 films

S.B.S. Heil; E. Langereis; M.C.M. Sanden, van de; W.M.M. Kessels

Plasma-assisted atomic layer deposition of AI2O3 films

S.B.S. Heil, E. Langereis, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Contribution to conference › Poster

Abstract

No abstract

Original language	English
Pages	A 18-
Publication status	Published - 2006
Event	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands - Lunteren, Netherlands Duration: 22 Mar 2006 → 23 Mar 2006

Conference

Conference	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands
Country/Territory	Netherlands
City	Lunteren
Period	22/03/06 → 23/03/06

Bibliographical note

18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

Cite this

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title = "Plasma-assisted atomic layer deposition of AI2O3 films",

abstract = "No abstract",

author = "S.B.S. Heil and E. Langereis and {Sanden, van de}, M.C.M. and W.M.M. Kessels",

note = "18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts; 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands ; Conference date: 22-03-2006 Through 23-03-2006",

year = "2006",

language = "English",

pages = "A 18--",

}

TY - CONF

T1 - Plasma-assisted atomic layer deposition of AI2O3 films

AU - Heil, S.B.S.

AU - Langereis, E.

AU - Sanden, van de, M.C.M.

AU - Kessels, W.M.M.

N1 - 18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

PY - 2006

Y1 - 2006

N2 - No abstract

AB - No abstract

M3 - Poster

SP - A 18-

T2 - 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands

Y2 - 22 March 2006 through 23 March 2006

ER -

Plasma-assisted atomic layer deposition of AI2O3 films

Abstract

Conference

Bibliographical note

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