Plasma-assisted Atomic Layer Deposition: High-volume manufacturing and new opportunities in research

Engineering

• Gas Fuel Manufacture 50%
• High Volume 50%
• Atomic Layer Deposition 50%
• Surfaces 25%
• Fields 25%
• Research 25%
• Applications 25%
• Nanoelectronics 25%
• Breakthrough 25%
• Deposition Process 25%
• Foundations 25%
• Reactant 25%

Earth and Planetary Sciences

• Plasma 100%
• Manufacturing 50%
• Atomic Layer Epitaxy 50%
• Research 25%
• Netherlands 25%
• Knowledge 25%
• Utilization 25%
• Foundation 25%

Chemical Engineering

• Atomic Layer Deposition 50%