| Original language | English |
|---|---|
| Title of host publication | 16th International Colloquium on Plasma Processing (CIP 2007), 4-8 June, 2007, Toulouse, France |
| Pages | 61- |
| Publication status | Published - 2007 |
Plasma assisted atomic layer deposition for 3D integration and other applications
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic