Plasma-assisted atomic layer deposition: applications, opportunities, and mechanisms

Research output: Contribution to conferenceOtherAcademic

Abstract

Abstract only.
Original languageEnglish
Number of pages1
Publication statusPublished - 2007
Event54th International Symposium American Vacuum Society (Peter Mark Memorial Award honorary lectureship) - Seattle, WA, United States
Duration: 14 Oct 200714 Oct 2007

Conference

Conference54th International Symposium American Vacuum Society (Peter Mark Memorial Award honorary lectureship)
Abbreviated titleAVS 54
CountryUnited States
CitySeattle, WA
Period14/10/0714/10/07

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