Plasma-assisted atomic layer deposition: applications, opportunities, and mechanisms

W.M.M. Kessels

Plasma-assisted atomic layer deposition: applications, opportunities, and mechanisms

W.M.M. Kessels

Plasma & Materials Processing

Research output: Contribution to conference › Other › Academic

Abstract

Abstract only.

Original language	English
Number of pages	1
Publication status	Published - 2007
Event	54th International Symposium American Vacuum Society (Peter Mark Memorial Award honorary lectureship) - Seattle, WA, United States Duration: 14 Oct 2007 → 14 Oct 2007

Conference

Conference	54th International Symposium American Vacuum Society (Peter Mark Memorial Award honorary lectureship)
Abbreviated title	AVS 54
Country	United States
City	Seattle, WA
Period	14/10/07 → 14/10/07

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Cite this

@conference{067e89458ff94a3da283ceac86071782,

title = "Plasma-assisted atomic layer deposition: applications, opportunities, and mechanisms",

abstract = "Abstract only.",

author = "W.M.M. Kessels",

year = "2007",

language = "English",

note = "54th International Symposium American Vacuum Society (Peter Mark Memorial Award honorary lectureship), AVS 54 ; Conference date: 14-10-2007 Through 14-10-2007",

}