Plasma-assisted ALD of LiPO(N) for solid state batteries

B. Put, M.J. Mees, N. Hornsveld, A. Sepúlveda, P.M. Vereecken, W.M.M. Kessels, M. Creatore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)
105 Downloads (Pure)

Abstract

All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

Original languageEnglish
Title of host publicationLi-Ion Batteries
PublisherElectrochemical Society, Inc.
Pages61-69
Number of pages9
ISBN (Electronic)9781607685395
DOIs
Publication statusPublished - 2016
EventPassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016) - Honolulu, United States
Duration: 2 Oct 20167 Oct 2016
http://prime-intl.org/

Publication series

NameECS Transactions
Number20
Volume75
ISSN (Print)1938-6737

Conference

ConferencePassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016)
Abbreviated titlePRIME 2016
CountryUnited States
CityHonolulu
Period2/10/167/10/16
Internet address

Fingerprint

Atomic layer deposition
Solid electrolytes
Plasmas
Lithium
Phosphates
Ions
Aspect ratio
Anodes
Cathodes
Nitrogen
Coatings

Cite this

Put, B., Mees, M. J., Hornsveld, N., Sepúlveda, A., Vereecken, P. M., Kessels, W. M. M., & Creatore, M. (2016). Plasma-assisted ALD of LiPO(N) for solid state batteries. In Li-Ion Batteries (pp. 61-69). (ECS Transactions; Vol. 75, No. 20). Electrochemical Society, Inc.. https://doi.org/10.1149/07520.0061ecst
Put, B. ; Mees, M.J. ; Hornsveld, N. ; Sepúlveda, A. ; Vereecken, P.M. ; Kessels, W.M.M. ; Creatore, M. / Plasma-assisted ALD of LiPO(N) for solid state batteries. Li-Ion Batteries. Electrochemical Society, Inc., 2016. pp. 61-69 (ECS Transactions; 20).
@inproceedings{96326276823d4172821a563e84a96f63,
title = "Plasma-assisted ALD of LiPO(N) for solid state batteries",
abstract = "All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.",
author = "B. Put and M.J. Mees and N. Hornsveld and A. Sep{\'u}lveda and P.M. Vereecken and W.M.M. Kessels and M. Creatore",
year = "2016",
doi = "10.1149/07520.0061ecst",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society, Inc.",
number = "20",
pages = "61--69",
booktitle = "Li-Ion Batteries",
address = "United States",

}

Put, B, Mees, MJ, Hornsveld, N, Sepúlveda, A, Vereecken, PM, Kessels, WMM & Creatore, M 2016, Plasma-assisted ALD of LiPO(N) for solid state batteries. in Li-Ion Batteries. ECS Transactions, no. 20, vol. 75, Electrochemical Society, Inc., pp. 61-69, Passific Rime Meeting on Electrochemical an Solid State Science (PRiME2016), Honolulu, United States, 2/10/16. https://doi.org/10.1149/07520.0061ecst

Plasma-assisted ALD of LiPO(N) for solid state batteries. / Put, B.; Mees, M.J.; Hornsveld, N.; Sepúlveda, A.; Vereecken, P.M.; Kessels, W.M.M.; Creatore, M.

Li-Ion Batteries. Electrochemical Society, Inc., 2016. p. 61-69 (ECS Transactions; Vol. 75, No. 20).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Plasma-assisted ALD of LiPO(N) for solid state batteries

AU - Put, B.

AU - Mees, M.J.

AU - Hornsveld, N.

AU - Sepúlveda, A.

AU - Vereecken, P.M.

AU - Kessels, W.M.M.

AU - Creatore, M.

PY - 2016

Y1 - 2016

N2 - All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

AB - All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

UR - http://www.scopus.com/inward/record.url?scp=85018648019&partnerID=8YFLogxK

U2 - 10.1149/07520.0061ecst

DO - 10.1149/07520.0061ecst

M3 - Conference contribution

AN - SCOPUS:85018648019

T3 - ECS Transactions

SP - 61

EP - 69

BT - Li-Ion Batteries

PB - Electrochemical Society, Inc.

ER -

Put B, Mees MJ, Hornsveld N, Sepúlveda A, Vereecken PM, Kessels WMM et al. Plasma-assisted ALD of LiPO(N) for solid state batteries. In Li-Ion Batteries. Electrochemical Society, Inc. 2016. p. 61-69. (ECS Transactions; 20). https://doi.org/10.1149/07520.0061ecst