Plasma-assisted ALD of LiPO(N) for solid state batteries

B. Put, M.J. Mees, N. Hornsveld, A. Sepúlveda, P.M. Vereecken, W.M.M. Kessels, M. Creatore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

14 Citations (Scopus)
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All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

Original languageEnglish
Title of host publicationLi-Ion Batteries
PublisherElectrochemical Society, Inc.
Number of pages9
ISBN (Electronic)9781607685395
Publication statusPublished - 2016
EventPassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016) - Honolulu, United States
Duration: 2 Oct 20167 Oct 2016

Publication series

NameECS Transactions
ISSN (Print)1938-6737


ConferencePassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016)
Abbreviated titlePRIME 2016
Country/TerritoryUnited States
Internet address


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