@inproceedings{e62ba4c1e4d44ce28da16bdb06dd8129,
title = "Plasma-assisted ALD of Al2O3 at low temperatures : reaction mechanism and material properties",
abstract = "Multiple in situ diagnostics have been employed to study the reaction mechanism of plasma-assisted ALD of Al2O3 and the influence of the substrate temperature on the material properties obtained. The results demonstrate that the ALD mechanism is governed by the formation of -CH3 surface groups and CH4 byproducts upon A1(CH 3)3 adsorption, while -OH surface groups and H 2O, CO, and CO2 by-products are formed during the remote O2 plasma step. It has been observed that the amount of-OH involved in the ALD process increases with decreasing substrate temperatures which can account for the increase in growth per cycle at lower substrate temperatures. Moreover for substrate at 25 °C, it has been found that a prolonged plasma exposure in the ALD cycle is effective in improving the film quality by a reduction of the impurity content and an increase in the mass density. {\textcopyright} The Electrochemical Society.",
author = "E. Langereis and M. Bouman and J. Keijmel and S.B.S. Heil and {Sanden, van de}, M.C.M. and W.M.M. Kessels",
year = "2008",
doi = "10.1149/1.2980000",
language = "English",
series = "ECS Transactions",
pages = "247--255",
booktitle = "Atomic Layer Deposition Applications 4 - 214th ECS Meeting; Honolulu, HI; 13 October 2008 through 15 October 2008",
}