Plasma-assisted ALD : from basic understanding to successful commercialization

W.M.M. Kessels, C.J. Hodson, Q. Fang, N. Singh, F. Anderson, W. Keuning, Stephan Heil, Hans Hemmen, van, E. Langereis, M.C.M. Sanden, van de

Research output: Contribution to conferenceOther

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Original languageEnglish
Number of pages11
Publication statusPublished - 2009
EventNetherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands - Delft, Netherlands
Duration: 5 Nov 20096 Nov 2009

Conference

ConferenceNetherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands
CountryNetherlands
CityDelft
Period5/11/096/11/09

Cite this

Kessels, W. M. M., Hodson, C. J., Fang, Q., Singh, N., Anderson, F., Keuning, W., ... Sanden, van de, M. C. M. (2009). Plasma-assisted ALD : from basic understanding to successful commercialization. Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands, Delft, Netherlands.