Plasma-assisted ALD : from basic understanding to successful commercialization

W.M.M. Kessels; C.J. Hodson; Q. Fang; N. Singh; F. Anderson; W. Keuning; Stephan Heil; Hans Hemmen, van; E. Langereis; M.C.M. Sanden, van de

Plasma-assisted ALD : from basic understanding to successful commercialization

W.M.M. Kessels, C.J. Hodson, Q. Fang, N. Singh, F. Anderson, W. Keuning, Stephan Heil, Hans Hemmen, van, E. Langereis, M.C.M. Sanden, van de

Plasma & Materials Processing

Research output: Contribution to conference › Other › Academic

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Original language	English
Number of pages	11
Publication status	Published - 2009
Event	Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands - Delft, Netherlands Duration: 5 Nov 2009 → 6 Nov 2009

Conference

Conference	Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands
Country	Netherlands
City	Delft
Period	5/11/09 → 6/11/09

Cite this

@conference{94ad104e286748758f6641105c9303ea,

title = "Plasma-assisted ALD : from basic understanding to successful commercialization",

author = "W.M.M. Kessels and C.J. Hodson and Q. Fang and N. Singh and F. Anderson and W. Keuning and Stephan Heil and {Hemmen, van}, Hans and E. Langereis and {Sanden, van de}, M.C.M.",

year = "2009",

language = "English",

note = "Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands ; Conference date: 05-11-2009 Through 06-11-2009",

}

Plasma-assisted ALD : from basic understanding to successful commercialization. / Kessels, W.M.M.; Hodson, C.J.; Fang, Q.; Singh, N.; Anderson, F.; Keuning, W.; Heil, Stephan; Hemmen, van, Hans; Langereis, E.; Sanden, van de, M.C.M.

2009. Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands, Delft, Netherlands.

Research output: Contribution to conference › Other › Academic

TY - CONF

T1 - Plasma-assisted ALD : from basic understanding to successful commercialization

AU - Kessels, W.M.M.

AU - Hodson, C.J.

AU - Fang, Q.

AU - Singh, N.

AU - Anderson, F.

AU - Keuning, W.

AU - Heil, Stephan

AU - Hemmen, van, Hans

AU - Langereis, E.

AU - Sanden, van de, M.C.M.

PY - 2009

Y1 - 2009

M3 - Other

T2 - Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands

Y2 - 5 November 2009 through 6 November 2009

ER -