Plasma-assisted ALD : from basic understanding to successful commercialization

W.M.M. Kessels; C.J. Hodson; Q. Fang; N. Singh; F. Anderson; W. Keuning; Stephan Heil; Hans Hemmen, van; E. Langereis; M.C.M. Sanden, van de

Plasma-assisted ALD : from basic understanding to successful commercialization

W.M.M. Kessels, C.J. Hodson, Q. Fang, N. Singh, F. Anderson, W. Keuning, Stephan Heil, Hans Hemmen, van, E. Langereis, M.C.M. Sanden, van de

Research output: Contribution to conference › Other › Academic

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Original language	English
Number of pages	11
Publication status	Published - 2009
Event	Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands - Delft, Netherlands Duration: 5 Nov 2009 → 6 Nov 2009

Conference

Conference	Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands
Country/Territory	Netherlands
City	Delft
Period	5/11/09 → 6/11/09

Cite this

@conference{94ad104e286748758f6641105c9303ea,

title = "Plasma-assisted ALD : from basic understanding to successful commercialization",

author = "W.M.M. Kessels and C.J. Hodson and Q. Fang and N. Singh and F. Anderson and W. Keuning and Stephan Heil and {Hemmen, van}, Hans and E. Langereis and {Sanden, van de}, M.C.M.",

year = "2009",

language = "English",

note = "Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands ; Conference date: 05-11-2009 Through 06-11-2009",

}

TY - CONF

T1 - Plasma-assisted ALD : from basic understanding to successful commercialization

AU - Kessels, W.M.M.

AU - Hodson, C.J.

AU - Fang, Q.

AU - Singh, N.

AU - Anderson, F.

AU - Keuning, W.

AU - Heil, Stephan

AU - Hemmen, van, Hans

AU - Langereis, E.

AU - Sanden, van de, M.C.M.

PY - 2009

Y1 - 2009

M3 - Other

T2 - Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands

Y2 - 5 November 2009 through 6 November 2009

ER -